Chemical vapor deposition (CVD) on an inclined susceptor: a case-study problem. An important application of convective mass transfer theory is in CVD processes employed to coat surfaces with thin films of metals or semi-conductors. In fact, this turns out to be an example of simultaneous heat and mass transfer with chemical reaction. A flat plate is used as a susceptor to deposit a material for a semi-conductor application. The inclination of the plate is θ to the horizontal. The flow will then be governed by the Falkner–Skan equation described in Section 15.6. Your goal is to set up a mass transfer model and evaluate the variation of the local mass transfer coefficient at various locations in the plate. Usually a constant or nearly constant boundary-layer thickness is preferable. Investigate the conditions leading to this requirement.
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